Message

If somebody can help me , or if you can give me for shure some e-mail address, please do.
I have a problem doing analysis of meander line on Si substrate.
I’m working HF electromagnetic analzysis in Ansys 10 Multiphysich.
Substrate is 760x760 micrometer, and 400micrometer hight.On top of it there is SiO2 layer of 5 micrometer of thickness, and then gos meander line whosw with is 40 micrometer and thisknes is 8 nicrometer.I cant get good S parameters wich I then use to get Q an L.
I'd tried over fifty diferent combinations of excitations and boundary conditions without succession.
If somebody can tell me what about rules for current and port excitation and boundary conditions for this particular case wich is diferent from those from HF guides in ANSYS please do.
Here goes my comand metod example (on this structure I'd tried those combinations) so that you can see how I treat this case.As I said this is just one of many of my combinations that I'd tried.

!-------- COMAND METOD------------
/prep7
/units,SI
tunif,25
! --- define elements and materials ---
epsr_SiO2=3.9
epsr_Si=11.9

et,11,200,7
et,1,120,1,,,0 !normal element
et,2,120,1,,,1 !PML element

! air
mp,murx,1,1.
mp,perx,1,1.

! Cu
mp,murx,2,1.
mp,perx,2,1.
mp,rsvx,2,1.724e-8

! SiO2
mp,murx,3,1
mp,perx,3,epsr_SiO2
mp,rsvx,3,1e12

! Si
mp,murx,4,1.
mp,perx,4,epsr_Si
mp,rsvx,4,0.1

! --- set up geometry ---
LOCAL, 11, 0, 0, 0, 0, 0, 90
wpcsys, , 11

s=40
krak=120
str=160
vazd=2000
cu=8
sio2=-5
si=-400
pml=8000

*dim,_a,array,10
*dim,_b,array,22
_a(1)=-380
_a(2)=_a(1)+str
_a(3)=_a(2)+s
_a(4)=_a(3)+s
_a(5)=_a(4)+krak
_a(6)=_a(5)+s
_a(7)=_a(6)+krak
_a(8)=_a(7)+s
_a(9)=_a(8)+s
_a(10)=_a(9)+str

_b(1)=-8240
_b(2)=_b(1)+pml
_b(3)=_b(2)+krak
_b(4)=_b(3)+krak
_b(5)=_b(4)+krak
*do,_i,6,16,2
_b(_i)=_b(_i-1)+s
_b(_i+1)=_b(_i)+s
*enddo
_b(18)=_b(17)+s
_b(19)=_b(18)+krak
_b(20)=_b(19)+krak
_b(21)=_b(20)+krak
_b(22)=_b(21)+pml
*do,_i,1,9
*do,_j,1,21
rect,_a(_i),_a(_i+1),_b(_j),_b(_j+1)
*enddo
aglue,all
numcmp,area
*enddo
aglue,all

*do,_i,1,9
a=_i
*if,a,EQ,2,then
asel,none
asel, a, area, , (a)*21+7, (a)*21+9,1
asel, a, area, , (a)*21+11, (a)*21+13,1
asel, a, area, , (a)*21+15, (a)*21+17,1
cm,traka,area
*elseif,a,EQ,3,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+7, (a)*21+9,2
asel,a, area, , (a)*21+11, (a)*21+13,2
asel,a, area, , (a)*21+15, (a)*21+17,2
cm,traka,area
*elseif,a,EQ,4,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+1, (a+1)*21,1
asel,u, area, , a*21+6, a*21+16,2
cm,traka,area
*elseif,a,EQ,5,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+5, (a)*21+7,2
asel,a, area, , (a)*21+9, (a)*21+11,2
asel,a, area, , (a)*21+13, (a)*21+15,2
cm,traka,area
*elseif,a,EQ,6,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+5, (a)*21+7,1
asel,a, area, , (a)*21+9, (a)*21+11,1
asel,a, area, , (a)*21+13, (a)*21+15,1
cm,traka,area
*endif

*enddo
cmsel,s, traka !
asel, inve
cm,oko_trake,area

csys,0
alls

alls
LESIZE, all, 40, , , , 1

lsel,r,loc,z,(_b(1)+_b(2))*0.5
lsel,a,loc,z,(_b(21)+_b(22))*0.5
LESIZE, all, , , 4, , 1

alls
lsel,r,loc,z,(_b(2)+_b(3))*0.5
lsel,a,loc,z,(_b(3)+_b(4))*0.5
lsel,a,loc,z,(_b(4)+_b(5))*0.5
lsel,a,loc,z,(_b(18)+_b(19))*0.5
lsel,a,loc,z,(_b(19)+_b(20))*0.5
lsel,a,loc,z,(_b(20)+_b(21))*0.5
LESIZE, all, , , 3, , 1
lsel,u,loc,z,_b(4),_b(19)
lsel,u,loc,x,_a(5),_a(6)
LESIZE, all, , , 1, , 1

alls
lsel,r,loc,x,(_a(1)+_a(2))*0.5
lsel,a,loc,x,(_a(9)+_a(10))*0.5
LESIZE, all, , , 3, , 1
lsel,u,loc,z,_b(5),_b(18)
LESIZE, all, , , 1, , 1

alls
lsel,r,loc,x,(_a(2)+_a(3))*0.5
lsel,a,loc,x,(_a(7)+_a(8))*0.5
LESIZE, all, , , 3, , 1
lsel,u,loc,z,_b(7),_b(17)
LESIZE, all, , , 1, , 1

alls
lsel,r,loc,x,(_a(5)+_a(6))*0.5
lsel,u,loc,z,_b(6),_b(17)
LESIZE, all, , , 4, , 1

alls
lsel,r,loc,z,(_b(5)+_b(6))*0.5
lsel,r,loc,x,_a(6),_a(10)
LESIZE, all, , , 4, , 1
lsel,r,loc,x,_a(8),_a(10)
LESIZE, all, , , 2, , 1

alls
lsel,r,loc,z,(_b(17)+_b(18))*0.5
lsel,r,loc,x,_a(1),_a(5)
LESIZE, all, , , 2, , 1
lsel,r,loc,x,_a(4),_a(5)
LESIZE, all, , , 4, , 1

alls
lsel,none
*do,j,8,16,4
lsel,a,loc,z,_b(j)
lsel,a,loc,z,_b(j+1)
*enddo
lsel,r,loc,x,(_a(3)+_a(4))*0.5
LESIZE, all, , , 4, , 1
lsel,none
*do,j,6,14,4
lsel,a,loc,z,_b(j)
lsel,a,loc,z,_b(j+1)
*enddo
lsel,r,loc,x,(_a(7)+_a(8))*0.5
LESIZE, all, , , 4, , 1

alls
lsel,none
*do, i,7,16,2
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
lsel,r,loc,x,_a(4),_a(7)
LESIZE, all, , , 4, , 1

alls
lsel,none
*do, i,7,16,2
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
lsel,u,loc,x,_a(4),_a(7)
LESIZE, all, , , 2, , 1

alls
lsel,r,loc,z,(_b(6)+_b(7))*0.5
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(1),_a(3)
LESIZE, all, , , 1, , 1

alls
lsel,r,loc,z,(_b(16)+_b(17))*0.5
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(8),_a(10)
LESIZE, all, , , 1, , 1

alls
lsel,none
*do, i,8,17,4
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(8),_a(10)
LESIZE, all, , , 1, , 1

alls
lsel,none
*do, i,10,15,4
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(1),_a(3)
LESIZE, all, , , 1, , 1

alls
*do, i,8,17,4
lsel,u,loc,z,_b(i)
lsel,u,loc,z,_b(i+1)
*enddo
lsel,r,loc,x,(_a(3)+_a(4))*0.5
LESIZE, all, , , 2, , 1
alls
*do, i,6,15,4
lsel,u,loc,z,_b(i)
lsel,u,loc,z,_b(i+1)
*enddo
lsel,r,loc,x,(_a(7)+_a(8))*0.5
LESIZE, all, , , 2, , 1

alls
lsel,r,loc,z,(_b(5)+_b(6))*0.5
lsel,r,loc,x,_a(1),_a(5)
LESIZE, all, , , 1, , 1

alls
lsel,r,loc,z,(_b(17)+_b(18))*0.5
lsel,r,loc,x,_a(6),_a(10)
LESIZE, all, , , 1, , 1
alls
lsel,r,loc,x,(_a(5)+_a(6))*0.5
lsel,r,loc,z,_b(6),_b(17)
LESIZE, all, , , 1, , 1
alls

alls
MSHKEY, 1
/pnum,mat,1
/number,1
extopt,on
type,11
cmsel,s,oko_trake
AATT, 1, , 11, 0
cmsel,s,traka
AATT, 2, , 11, 0
alls
amesh,all

type,1
esize,,1
alls
vext,all,,,0,cu,0
alls
vsel,s,mat,,1
vclear,all
vatt,1,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,1,,2,0
alls
vsel,s,mat,,2
vclear,all
vatt,2,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,2,,2,0

alls
aclear,all
type,1
mat,3
esize,,4
asel,s,loc,y,0
vext,all,,,0,sio2,0
alls
vsel,s,loc,y,0,sio2
vatt,3,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,3,,2,0

alls
type,1
mat,4
esize,,7
asel,s,loc,y,sio2
vext,all,,,0,si,0
alls
vsel,s,loc,y,sio2,si
vatt,4,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,4,,2,0

alls
type,1
mat,1
esize,,10
asel,s,loc,y,cu
vext,all,,,0,vazd,0
alls
vsel,s,loc,y,cu,vazd
vatt,1,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,1,,2,0
alls
AATT, 1, , 11, 0
aclear,all

lsel,r,loc,y,1,7
LESIZE, all, , , 1, , 1
alls
lsel,r,loc,y,-1,-4
LESIZE, all, , , 4, , 1
alls
lsel,r,loc,y,9,1990
LESIZE, all, , , 10, , 1
alls
lsel,r,loc,y,-6,-390
LESIZE, all, , , 7, , 1
alls
vmesh,all

! --- PEC surfaces
alls
asel,r,ext
da,all,ax,0.
alls
! --- SHLD boundary conditions ---
vsel,s,mat,,2
asel,r,ext
asel,r,loc,z,-8e-3,8.7e-3
cm,cu_plast,area
SFA, all, 1, shld, 0.56e8, 1
alls
vsel,s,mat,,4
asel,r,ext
asel,r,loc,z,-8e-3,8.7e-3
cm,si_plast,area
SFA, all, 1, shld, 10, 1

! --- pobudna struja u Z=-120 ---
asel,s,loc,z,_b(3)
asel,r,loc,x,_a(5),_a(6)
asel,r,loc,y,si+sio2,0
bfa,all,js,0,1,0,-1
alls
! --- transmission line port ---
hfport,1,TLINE,,v1,,50
asel,s,loc,z,_b(4)
bfa,all,port,1
hfport,2,TLINE,,v2,,50
asel,s,loc,z,_b(19)
bfa,all,port,2
scal=1e-6
vlscale,all,,,scal,scal,scal,,,1
! --- voltage paths ---
z1=scal*_b(4)
xv1=scal*0.5*(_a(5)+_a(6))
yv1=scal*(si+sio2)
yv2=8e-6
nv11=node(xv1,yv1,z1)
nv12=node(xv1,yv2,z1)
path,v1,2
ppath,1,nv11
ppath,2,nv12
z2=scal*_b(19)
nv21=node(xv1,yv1,z2)
nv22=node(xv1,yv2,z2)
path,v2,2
ppath,1,nv21
ppath,2,nv22
pasave,all
alls
vclear,all
vmesh,all
sbctran
save
fini

! --- solution ---
/solu
spswp,1.e9,5e9,5.e8,1,,1,2
fin